Sputtering of polycrystalline metals by inert gas ions of low energy (100–1000 eV)
Author:
Publisher
Elsevier BV
Subject
General Engineering
Reference3 articles.
1. Sputtering of a polycristalline silver surface bombarded with monoenergetic argon ions of low energy (40–240 eV)
2. Cathode sputtering by rare gas ions of low energy;Koedam;thesis Utrecht,1961
3. Sputtering Yields of Metals for Ar+ and Ne+ Ions with Energies from 50 to 600 ev
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