Coarsening of high purity SiC particles by gas phase transport-Reference-Cited by-同舟云学术

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Coarsening of high purity SiC particles by gas phase transport

Published:2015-12 Issue:10 Volume:41 Page:14958-14963
ISSN:0272-8842
Container-title:Ceramics International
language:en
Short-container-title:Ceramics International

Author:

Lee EunJu,Bang MinJung,Kim Byung-Sook,Kim Deug J.

Funder

Ministry of Education, Science and Technology

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Process Chemistry and Technology,Ceramics and Composites,Electronic, Optical and Magnetic Materials

Reference16 articles.

1. Silicon carbide products for silicon semiconductor manufacturing;Kageyama;Ceram. Jpn.,1995

2. LPCVD components trend toward SiC;Tomanovich;Solid State Technol.,1997

3. Introductory remarks on ceramics for silicon semiconductor manufacturing VLSI fabrication and its related;Segawara;Ceram. Jpn.,1995

4. Silica glass for semiconductor process;Fhiraishi;Ceram. Jpn.,1995

5. Pressure-sintered silicon carbide;Alliego;J. Am. Ceram. Soc.,1956

Cited by 3 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Purification of β -SiC powders by heat treatment in vacuum;Advanced Composites and Hybrid Materials;2021-11-12

2. A SiCnw/PyC -toughened ZrB2-SiC coating for protecting Si-SiC coated C/C composites against oxidation;Applied Surface Science;2018-11

3. Effects of pyrocarbon on morphology stability of SiC nanowires at high temperatures;Journal of the American Ceramic Society;2018-03-09

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