Aerosol deposited BaTiO3 film based interdigital capacitor and squared spiral capacitor for humidity sensing application-Reference-Cited by-同舟云学术

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Aerosol deposited BaTiO3 film based interdigital capacitor and squared spiral capacitor for humidity sensing application

Published:2021-01 Issue:1 Volume:47 Page:510-520
ISSN:0272-8842
Container-title:Ceramics International
language:en
Short-container-title:Ceramics International

Author:

Kumar Alok,Wang Cong,Meng Fan-Yi,Liang Jun-Ge,Xie Bing-Fang,Zhou Zhong-Liang,Zhao Meng,Kim Nam-Young

Funder

China Postdoctoral Science Foundation

Heilongjiang Postdoctoral Fund

Fundamental Research Fund for the Central Universities

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Process Chemistry and Technology,Ceramics and Composites,Electronic, Optical and Magnetic Materials

Reference60 articles.

1. Humidity sensors: a review of materials and mechanisms;Chen;Sens. Lett.,2005

2. Humidity sensors principle, mechanism, and fabrication technologies: a comprehensive review;Farahani;Sensors,2014

3. Ceramic sensors for humidity detection: the state of-the-art and future developments;Traversa;Sens. and Act.-B.,1995

4. A resistive-type humidity sensor using composite films prepared from poly(2-acrylamido-2-methylpropane sulfonate) and dispersed organic silicon sol;Su;Talanta,2005

5. High-Performance porous MIM-type capacitive humidity sensor realized via inductive coupled plasma and reactive-Ion etching;Qiang;Sens. and Act.-B.,2018

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