The generation mechanism and suppression method of the "comet tail" defect on the single-crystal silicon surface polishing with magnetorheological-Reference-Cited by-同舟云学术

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The generation mechanism and suppression method of the "comet tail" defect on the single-crystal silicon surface polishing with magnetorheological

Published:2022-06 Issue:12 Volume:48 Page:17621-17631
ISSN:0272-8842
Container-title:Ceramics International
language:en
Short-container-title:Ceramics International

Author:

Shi Feng,Qiao Shuo,Tian Ye,Song Ci,Tie Guipeng,Jiao Zhaoyang,Luo Chi,Zhou Gang

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Process Chemistry and Technology,Ceramics and Composites,Electronic, Optical and Magnetic Materials

Reference31 articles.

1. A novel polishing method for single-crystal silicon using the cavitation rotary abrasive flow;Zhao;Precis. Eng.,2020

2. Ultrasonic vibration mill-grinding of single-crystal silicon carbide for pressure sensor diaphragms;Li;Ceram. Int.,2017

3. Material removal mechanism and crack propagation in single scratch and double scratch tests of single-crystal silicon carbide by abrasives on wire saw;Wang;Ceram. Int.,2019

4. Predicting the material removal rate (mrr) in surface magnetorheological finishing (mrf) based on the synergistic effect of pressure and shear stress;Liu;Appl. Surf. Sci.,2020

5. Polishing performance of magnetorheological finishing with flocculated and deflocculated aqueous polishing fluid;Bai;Opt. Eng.,2019

Cited by 5 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Research progress of magnetorheological polishing technology: a review;Advances in Manufacturing;2024-05-16

2. Multi-pole magnetorheological shear thickening polishing on inner surface of aluminum alloy slender tubes;Journal of Materials Research and Technology;2023-11

3. A novel specialized material removal rate model considering the synergistic effect of dynamic pressure and shear stress for the permanent-magnet small ball-end magnetorheological polishing;Journal of Manufacturing Processes;2023-09

4. Advanced nonlinear rheology magnetorheological finishing: A review;Chinese Journal of Aeronautics;2023-06

5. High-quality surface polishing of selective-laser-melting stainless steel by defoamed magnetorheological elastomer;Precision Engineering;2023-05

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