Effect of nitrogen plasma on the mechanical and electrical properties of plasma-enhanced atomic layer deposited TiN films-Reference-Cited by-同舟云学术

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Effect of nitrogen plasma on the mechanical and electrical properties of plasma-enhanced atomic layer deposited TiN films

Published:2022-09 Issue:17 Volume:48 Page:25651-25655
ISSN:0272-8842
Container-title:Ceramics International
language:en
Short-container-title:Ceramics International

Author:

Shin Jeong Woo,Lee Jaehyeong,Kim Keunhoi^ORCID,Kwon Chansong,Park Young Bin,Park Heesung,Kim Kwanlae^ORCID,Ahn Hyo Suk,Shim Dongha,An Jihwan

Funder

Seoul National University of Science and Technology

Ministry of Education

Ministry of Trade, Industry and Energy

Korea Institute for Advancement of Technology

National Research Foundation of Korea

Nano-Convergence Foundation

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Process Chemistry and Technology,Ceramics and Composites,Electronic, Optical and Magnetic Materials

Reference20 articles.

1. Atomic layer deposition of titanium nitride from TDMAT precursor;Musschoot;Microelectron. Eng.,2009

2. Remote plasma enhanced atomic layer deposition of titanium nitride film using metal organic precursor (C12H23N3Ti) and N2 plasma;Kim;Appl. Surf. Sci.,2021

3. Ultrathin effective TiN protective films prepared by plasma-enhanced atomic layer deposition for high performance metallic bipolar plates of polymer electrolyte membrane fuel cells;Lee;Appl. Surf. Sci.,2020

4. An investigation into TiN-coated 316L stainless steel as a bipolar plate material for PEM fuel cells;Wang;J. Power Sources,2007

5. The effect of deposition temperature on microstructure and properties of thermal CVD TiN coatings;Wagner;Int. J. Refract. Metals Hard Mater.,2008

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1. Plasmonic group IVB transition metal nitrides: Fabrication methods and applications in biosensing, photovoltaics and photocatalysis;Advances in Colloid and Interface Science;2024-11

2. Hydrogen Plasma-Assisted Atomic Layer Deposition of Ru with Low Oxygen Content;Korean Journal of Chemical Engineering;2024-02-21

3. Titanium nitride (TiN) as a promising alternative to plasmonic metals: a comprehensive review of synthesis and applications;Materials Advances;2024

4. Influence of using different titanium cathodic cage plasma deposition configurations on the mechanical, tribological, and corrosion properties of AISI 304 stainless steel;Surface and Coatings Technology;2023-12

5. Investigation of spatial distribution of EEPFs and neutral species in nitrogen inductively coupled plasmas by 2D hybrid simulation;Physics of Plasmas;2023-09-01

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