Preparation strategy for low-stress and uniform SiC-on-diamond wafer: A silicon nitride dielectric layer

Author:

Zheng Yuting,Zhang Qinrui,Qiao Guanzhong,Wei Junjun,Liu Jinlong,Chen Liangxian,An Kang,Zhang Xiaotong,Ye Haitao,Zhou Haojun,Tao Hongliang,Yin Yuhang,Ouyang Xiaoping,Li Chengming

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Process Chemistry and Technology,Ceramics and Composites,Electronic, Optical and Magnetic Materials

Reference55 articles.

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3. CVD diamond-SiC composite films: structure and electrical properties;Popovich;Diam. Relat. Mater.,2022

4. The effect of GaN epilayer thickness on the near-junction thermal resistance of GaN-on-diamond devices;Song;Int. J. Heat Mass Tran.,2020

5. Piezoelectric nanogenerators with high performance against harsh conditions based on tunable N doped 4H-SiC nanowire arrays;Zhou;Nano Energy,2021

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