Author:
Li Xiaoxiao,Tian Yun,Gao Fengmei,Wang Lin,Chen Shanliang,Yang Weiyou
Funder
National Natural Science Foundation of China
Zhejiang Provincial Nature Science Foundation
Natural Science Foundation of Ningbo Municipal Government
Subject
Materials Chemistry,Surfaces, Coatings and Films,Process Chemistry and Technology,Ceramics and Composites,Electronic, Optical and Magnetic Materials
Reference63 articles.
1. Surface micromachined pressure transducers;Guckel;Sens. Actuators A,1991
2. Design principles and considerations for the ‘ideal’ silicon piezoresistive pressure sensor: a focused review;Kumar;Microsyst. Technol.,2014
3. Micro/nano-mechanical sensors and actuators based on soi-mems technology;Dao;Adv. Nat. Sci.: Nanosci. Nanotechnol.,2010
4. Materials issues in microellctromechanical systens (MEMS);Spearing;Acta Mater.,2000
5. Characterization of n-type β-SiC as a piezoresistor;Shor;IEEE Trans. Electron Devices,1993
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