Funder
Ministry of Science, ICT and Future Planning
Korea Institute of Industrial Technology
National Research Foundation of Korea
Subject
Materials Chemistry,Surfaces, Coatings and Films,Process Chemistry and Technology,Ceramics and Composites,Electronic, Optical and Magnetic Materials
Reference21 articles.
1. Effect of additives on the electrostatic force of alumina electrostatic chucks;Watanabe;Nippon Seram Kyo Gak,1992
2. (!!! INVALID CITATION !!! [1, 2]).
3. Fundamental study of an electrostatic chuck for silicon wafer handling;Asano;IEEE Trans. Ind. Appl.,2002
4. (!!! INVALID CITATION !!! [4]).
5. Microstructure and wear resistance of nanostructured Al2O3-8wt.%TiO2 coatings plasma-sprayed with nanopowders;Song;Surf. Coating. Technol.,2006
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