Concentration and temperature dependent selectivity of the LTCC porosification process with phosphoric acid

Author:

Steinhäußer Frank,Talai Armin,Göltl Gwen,Steiger-Thirsfeld Andreas,Bittner Achim,Weigel Robert,Koelpin Alexander,Schmid Ulrich

Funder

Austrian Research Promotion Agency

Bavarian Ministry of Economic Affairs, Infrastructure, Transport and Technology

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Process Chemistry and Technology,Ceramics and Composites,Electronic, Optical and Magnetic Materials

Reference30 articles.

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2. F.Ernst, M. Kunert, The 79GHz Project, Robert Bosch GmbH, Leonberg, Germany. 〈http://www.79ghz.eu/〉, 2014 (accessed 14.12.14, 15:20).

3. Innovation steps towards a novel and cost efficient LTCC packaging technology for high end applications;Bechtold;Inf. Midem-J. Microelectron. Electron. Compon. Mater.,2012

4. Low loss dielectric materials for LTCC applications: a review;Sebastian;Int. Mater. Rev.,2008

5. The porosification of fired LTCC substrates by applying a wet chemical etching procedure;Bittner;J. Eur. Ceram. Soc.,2009

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