Effect of substrate temperature on the structural, electrical, and optical properties of GZO/ZnO films deposited by radio frequency magnetron sputtering-Reference-Cited by-同舟云学术

Effect of substrate temperature on the structural, electrical, and optical properties of GZO/ZnO films deposited by radio frequency magnetron sputtering

Published:2014-06 Issue:5 Volume:40 Page:6673-6676
ISSN:0272-8842
Container-title:Ceramics International
language:en
Short-container-title:Ceramics International

Author:

Kim Sun-Kyung,Kim Seung-Hong,Kim So-Young,Jeon Jae-Hyun,Gong Tae-Kyung,Choi Dong-Hyuk,Son Dong-Il,Kim Daeil

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Process Chemistry and Technology,Ceramics and Composites,Electronic, Optical and Magnetic Materials

Reference10 articles.

1. Effects of electron irradiation on the properties of GZO films deposited with RF magnetron sputtering;Kim;Appl. Surf. Sci.,2012

2. Characterization of low pressure annealed ITO/Au/ITO films prepared by reactive magnetron sputtering;Kim;J. Alloys Compd.,2010

3. Influence of deposition parameters and annealing treatment on the properties of GZO films grown using RF magnetron sputtering;Huang;Ceram. Int.,2012

4. Room temperature growth and optoelectronic properties of GZO/ZnO bi-layer films on polycarbonate substrates by magnetron sputtering;Gong;Solar Energy Mater. Solar Cells,2010

5. Properties of GZO/ZnO films deposited with RF magnetron sputtering;Kim;Proc. KSHT,2013

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