Effects of oxygen concentration on the electrical properties of ZnO films

Author:

Kim Hong Seung,Jung Eun Soo,Lee Won-Jae,Kim Jin Hyeok,Ryu Sang-Ouk,Choi Sung-Yool

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Process Chemistry and Technology,Ceramics and Composites,Electronic, Optical and Magnetic Materials

Reference14 articles.

1. Substrate temperature dependence of electrical properties of ZnO:Al epitaxial films on sapphire (12¯10);lgasaki;J. Appl. Phys.,1991

2. Intrinsic defects in ZnO films grown by molecular beam epitaxy;Tatsumi;Jpn. J. Appl. Phys. Part 1,2004

3. Very low temperature growth of ZnO thin films on Si substrates using the metalorganic chemical vapor deposition technique;Kim;J. Korean Phys. Soc.,2004

4. Deposition-temperature dependence of ZnO/Si grown by pulsed laser deposition;Son;J. Korean Phys. Soc.,2004

5. Structural and optical properties of ZnO thin films grown by RF magnetron sputtering on Si substrates;Park;J. Korean Phys. Soc.,2004

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