Effects of deposition temperature on the crystallinity of Ba0.5Sr0.5TiO3 epitaxial thin films integrated on Si substrates by pulsed laser deposition method

Author:

Kim Eun Mi,Cho Ja-Young,Moon Jong Ha,Lee Won-Jae,Kim Hong Seung,Kim Jin Hyeok

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Process Chemistry and Technology,Ceramics and Composites,Electronic, Optical and Magnetic Materials

Reference15 articles.

1. Large dielectric constant (ɛ/ɛ0>6000) Ba0.4Sr0.6TiO3 thin films for high-performance microwave phase shifters;Carlson;Appl. Phys. Lett.,2000

2. Tunability of the dielectric constant of Ba0.1Sr0.9TiO3 ceramics in the paraelectric state;Outzourhit;J. Mater. Res.,1995

3. Dielectric and ferroelectric properties of heteroepitaxial BaxSr1−xTiO3 films grown on SrRuO3/SrTiO3 substrates;Abe;IEICE Trans. Electron. E81C,1998

4. Dissociation and evolution of threading dislocations in epitaxial Ba0.3Sr0.7TiO3 thin films grown on (001) LaAlO3;Lu;J. Appl. Phys.,2003

5. High-k BST films deposited on MgO by PLD with and without buffer-layer;Delage;Thin Solid Films,2004

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