Nanomechanical inhomogeneities in CVA-deposited titanium nitride thin films: Nanoindentation and finite element method investigations

Author:

Sharma Neeraj Kumar,Rana Anchal,Panwar O.S.,Rana Abhimanyu Singh

Funder

India Ministry of Science & Technology Department of Science and Technology

Science and Engineering Research Board

Publisher

Elsevier BV

Reference49 articles.

1. Alternative plasmonic materials: beyond gold and silver;Naik;Adv. Mater.,2013

2. Nanoparticle plasmonics: going practical with transition metal nitrides;Guler;Mater. Today,2015

3. Refractory plasmonics;Guler;Science,2014

4. Low-loss plasmonic metamaterials;Boltasseva;Science,2011

5. Plasmonic properties of nonstoichiometric zirconium nitride, oxynitride thin films, and their bilayer structures;Guo;Phys. Rev. Mater.,2021

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