Properties of hydrogenated carbon films produced by reactive magnetron sputtering

Author:

McKenzie D.R.,Briggs L.M.

Publisher

Elsevier BV

Subject

General Engineering

Cited by 36 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. History of diamond-like carbon films — From first experiments to worldwide applications;Surface and Coatings Technology;2014-03

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3. Isotopic 13C target foils 0.4–2.2mg/cm2 by pyrolysis of methane, with alternative methods of production;Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment;2006-05

4. Synthesis of polymer films by an electron emission CVD technique;Plasmas and Polymers;2002

5. An actinometric study of C2H2 plasma polymerization and film properties;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1995-11

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