Preparation and characteristics of a-Si:Cl:H films
Author:
Publisher
Elsevier BV
Subject
General Engineering
Reference9 articles.
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1. Amorphous silicon carbide films prepared by H2 diluted silane–methane plasma;Journal of Crystal Growth;2004-03
2. Impacts of hydrogen dilution on growth and optical properties of a-SiC:H films;Science in China Series E;2004
3. Improvement of film Quality of A-Si:H Deposited by Photo-CVD using SiH2Cl2;MRS Proceedings;1994
4. Photovoltaic characterization of amorphous hydrogenated and chlorinated silicon films;Thin Solid Films;1989-03
5. SiCl bonds in α-Si:H:Cl films;Solid State Communications;1986-06
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