Design, fabrication and vapor characterization of a microfabricated flexural plate resonator sensor and application to integrated sensor arrays-Reference-Cited by-同舟云学术

Design, fabrication and vapor characterization of a microfabricated flexural plate resonator sensor and application to integrated sensor arrays

Published:2001-03 Issue:2-3 Volume:73 Page:112-123
ISSN:0925-4005
Container-title:Sensors and Actuators B: Chemical
language:en
Short-container-title:Sensors and Actuators B: Chemical

Author:

Cunningham Brian,Weinberg Marc,Pepper Jane,Clapp Chris,Bousquet Rob,Hugh Brenda,Kant Richard,Daly Chris,Hauser Eric

Publisher

Elsevier BV

Subject

Materials Chemistry,Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference19 articles.

1. Flexural plate-wave gravimetric chemical sensor;Wenzel;Sens. Actuat. A,1990

2. Flexural plate wave devices for chemical analysis;Grate;Anal. Chem.,1991

3. R.M. White, S.W. Wenzel, US Patent 5,129,262, Plate-Mode Ultrasonic Sensor, July, 1992.

4. Vapor recognition with an integrated array of polymer coated flexural plate wave sensors;Cai;Sens. Actuat. B,2000

5. Analytical comparison of the sensitivities of bulk-wave, surface-wave and flexural plate-wave ultrasonic gravimetric sensors;Wenzel;Appl. Phys. Lett.,1989

Cited by 29 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. High throughput and label-free particle sensor based on microwave resonators;Sensors and Actuators A: Physical;2019-01

2. Chemical Sensor Based Upon Stress-Induced Changes in the Permeability of a Magnetoelastic Wire;Analytical Chemistry;2017-06-23

3. Surface roughness effects on the frequency tuning performance of a nanoelectromechanical resonator;Nanoscale Research Letters;2013-06-07

4. Fabrication and Characterization of Nanocomposite Films;Journal of Computational and Theoretical Nanoscience;2012-10-01

5. Design and Fabrication of a MEMS Flexural Plate Wave Device Based on LTO/ZnO/LTO/Si₃N₄ Multilayered Composite Membrane;Key Engineering Materials;2012-02