Photo-assisted silicon micromachining: opportunities for chemical sensing-Reference-Cited by-同舟云学术

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Photo-assisted silicon micromachining: opportunities for chemical sensing

Published:1996-09 Issue:1-3 Volume:35 Page:255-261
ISSN:0925-4005
Container-title:Sensors and Actuators B: Chemical
language:en
Short-container-title:Sensors and Actuators B: Chemical

Author:

Tuller H.L,Mlcak R

Publisher

Elsevier BV

Subject

Materials Chemistry,Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference22 articles.

1. Microstructures and Microfabricated Systems, PV 94-14,1994

2. Can micromachining deliver?;Vintro;Solid State Technology,1995

3. See for example, Journal of Microelectromechanical Systems.

4. Observation of a chemical reaction using a micromechanical sensor;Gimzewski;Chem. Phys. Lett.,1994

5. A microfabricated array of multiple thin film metal oxide sensors for multicomponent gas and vapor quantification;Wang,1992

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1. Study on Electrochemical and electrical discharge compound Micro-machining for Silicon;IOP Conference Series: Materials Science and Engineering;2019-07-01

2. MEMS Microresonators for High Temperature Sensor Applications;MRS Proceedings;2009

3. Semiconductor-Based Chemical Microsensors;MEMS: A Practical Guide to Design, Analysis, and Applications;2006

4. Semiconductor-Based Chemical Microsensors;MEMS;2006

5. CMOS‐based Chemical Sensors;Advanced Micro and Nanosystems;2005-01-26

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