Porous silicon-based humidity sensor with interdigital electrodes and internal heaters-Reference-Cited by-同舟云学术

Porous silicon-based humidity sensor with interdigital electrodes and internal heaters

Published:2003-10 Issue:1-3 Volume:95 Page:140-144
ISSN:0925-4005
Container-title:Sensors and Actuators B: Chemical
language:en
Short-container-title:Sensors and Actuators B: Chemical

Author:

Fürjes P.,Kovács A.,Dücso Cs.,Ádám M.,Müller B.,Mescheder U.

Publisher

Elsevier BV

Subject

Materials Chemistry,Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference8 articles.

1. Accurate 3D capacitance evaluation in integrated capacitive humidity sensors;Korvink;Sens. Mater.,1993

2. A novel surface micromachined capacitive porous silicon humidity sensor;Rittersma;Sens. Actuators B,2000

3. G.M. O’Halloran, et al., Porous silicon membrane for humidity sensing applications, in: Proceedings of the Eurosensors XII, Southampton, UK, September 1998, pp. 901–904.

4. T. Nitta, in: T. Seiyama (Ed.), Development and Application of Ceramic Humidity Sensors in Chemical Sensor Technology, vol. 1, Elsevier, Amsterdam, 1998.

5. Influence of humidity on transport in porous silicon;Mares;Thin Solid Films,1995

Cited by 71 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Structural Optimization of Polyimide-Film Humidity Sensors for New Energy Vehicles;ACS Applied Materials & Interfaces;2024-09-04

2. Fast-response humidity sensors based on all-inorganic lead-free Cs2PdBr6 perovskite integrated with bulk acoustic wave resonators for motions monitoring;Applied Surface Science;2024-03

3. Detection of frost growth and distribution on louver and offset strip fins of a microchannel heat exchanger using capacitance sensing approach;International Journal of Heat and Mass Transfer;2023-12

4. A Relative Humidity Measurement System Tolerant to Condensation Events Applied to Apple Storage;2023 7th International Symposium on Instrumentation Systems, Circuits and Transducers (INSCIT);2023-08-28

5. SYNTHESIS OF Pd NPs VIA LASER ABLATION IN LIQUID ASSISTED WITH MAGNETIC FIELD ON SILICON NANOSTRUCTURE FOR GAS SENSOR;Surface Review and Letters;2023-07-17