1. W. Kaplan, H. Elderstig, C. Vieider, A novel fabrication method of capillary tubes on quartz for chemical analysis applications, Proc. IEEE Workshop on Micro Electro Mechanical Systems (MEMS-94), Oiso, Japan, 1994, pp. 63–68.
2. Surface micromachined pressure transducers;Guckel;Sensors and Actuators,1991
3. D. Maier-Schneider, J. Maibach, E. Obermeier, Variations in Young's modulus and intrinsic stress of LPCVD-polysilicon due to high temperature annealing, Workshop Digest Micro Mechanics Europe (MME `94), Pisa, Italy, 1994, pp. 65–68.
4. P.J. French, Development of compatible micromachining processes in silicon, Proc. on Silicon Sensor Realisation Compatible with Microelectronic Circuit Fabrication, NEXUS, Toulouse, France, 1994, pp. 2–1, 2–27.
5. Polysilicon as a material for microsensor applications;Obermeier;Sensors and Actuators A,1992