Author:
L'Hostis E,Michel Ph.E,Fiaccabrino G.C,Strike D.J,de Rooij N.F,Koudelka-Hep M
Subject
Materials Chemistry,Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference21 articles.
1. Silicon wafer integrated enzyme reactors;Laurell;Biosens. Bioelectron.,1995
2. Micromachined analysers on a silicon chip;Arquint;Clin. Chem.,1994
3. A modular miniaturized chemical analysis system;Bart;Sens. Actuators, B,1993
4. Micromachining applications of a high resolution ultrathick photoresist;Lee;J. Vac. Sci. Technol., B,1995
5. Epon SU-8: a low-cost negative resist for MEMS;Lorenz,1996
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