Structure and gas-sensing characteristics of undoped tin oxide thin films fabricated by ion-assisted deposition

Author:

Song Seok-Kyun,Cho Jun-Sik,Choi Won-Kook,Jung Hyung-Jin,Choi Dongsoo,Lee Jeong-Yong,Baik Hong-Koo,Koh Seok-Keun

Publisher

Elsevier BV

Subject

Materials Chemistry,Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference23 articles.

1. Chemical composition and electrical properties of tin oxide films prepared by vapor deposition;Aboaf;J. Electrochem. Soc.,1973

2. Preparation and characterization of SnO2 thin films deposited by spray pyrolysis from SnCl2 and SnCl4 precusors;Gordillo;Thin Solid Films,1994

3. J.J. Cuomo, S.M. Rossnagel, H.R. Kaufman, Handbook of Ion Beam Processing Technology, Noyes, New Jersey, 1989, pp. 194–218.

4. The influence of input power on the performance of rf sputtered ITO/indium phosphide solar cells;Coutts;J. Vac. Sci. Technol.,1984

5. Integrated tin oxide odor sensors;Gardner;Sensors and Actuators B,1991

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