Fabrication of a micro catalytic gas sensor using thin film process and Si anisotropic etching techniques-Reference-Cited by-同舟云学术

Fabrication of a micro catalytic gas sensor using thin film process and Si anisotropic etching techniques

Published:1997-12 Issue:3 Volume:45 Page:265-269
ISSN:0925-4005
Container-title:Sensors and Actuators B: Chemical
language:en
Short-container-title:Sensors and Actuators B: Chemical

Author:

Lee Jae Suk,Park Jong Wan,Shin Sang Mo

Publisher

Elsevier BV

Subject

Materials Chemistry,Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference16 articles.

1. P.T. Moseley, B.C. Tofield, Solid State Gas Sensors, Adam Hilger, Bristol, 1987

2. An investigation of the dynamic behavior of a silicon microcalorimeter;Nuscheler;Sensors and Actuators,1989

3. The Si planar Pellistor: a low-power pellistor in Si thin-film technology;Gall;Sensors and Actuators B,1991

4. A.W. van Herwaarden, P.M. Sarro, J.W. Gardner, P. Bataillard, Micro-calorimeters for (bio)chemical measurements in gases and liquids, Digest of Technical Papers 7th International Conference on Solid-state Sensors and Actuators (Transducer'93), 1993, pp. 411–414.

5. A low power integrated catalytic gas sensor;Krebs;Sensors and Actuators B,1993

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