Real time optical correction using electrostatically actuated MEMS devices-Reference-Cited by-同舟云学术

Real time optical correction using electrostatically actuated MEMS devices

Published:1999-04 Issue:2-3 Volume:46 Page:91-101
ISSN:0304-3886
Container-title:Journal of Electrostatics
language:en
Short-container-title:Journal of Electrostatics

Author:

Horenstein M.,Bifano T.,Pappas S.,Perreault J.,Krishnamoorthy-Mali R.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Biotechnology,Electronic, Optical and Magnetic Materials

Reference15 articles.

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4. Development of Micro-electromechanical Deformable Mirrors for Phase Modulation of Light;Krishnamoorthy Mali;Optical Engineering,,1997

5. Electrostatic Effects in Micromachined Actuators for Adaptive Optics;Horenstein;Jour. of Electrostatics,1997

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