Electrostatic effects in micromachined actuators for adaptive optics-Reference-Cited by-同舟云学术

Electrostatic effects in micromachined actuators for adaptive optics

Published:1997-10 Issue:1-2 Volume:42 Page:69-81
ISSN:0304-3886
Container-title:Journal of Electrostatics
language:en
Short-container-title:Journal of Electrostatics

Author:

Horenstein Mark N.,Bifano Thomas G.,Mali Raji Krishnamoorthy,Vandelli Nelsimar

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Condensed Matter Physics,Biotechnology,Electronic, Optical and Magnetic Materials

Reference7 articles.

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4. P. Osterberg, H. Yie, X. Cai, J. White, S. Senturia, “Self Consistent Simulation and Modeling of Electrostatically Deformed Diaphragms”, Proc. MEMS '94, Oiso, Japan, Jan '94

5. 3-D Coupled Electromechanics for MEMS: Applications of CoSolve-EM;Gilbert,1995

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