Hybrid functional IrO2-TiO2 thin film resistor prepared by atomic layer deposition for thermal inkjet printheads

Author:

KWACK Won-Sub,MOON Hyoung-Seok,JEONG Seong-Jun,WANG Qi-min,Kwon Se-Hun

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Geotechnical Engineering and Engineering Geology,Condensed Matter Physics

Reference16 articles.

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2. CHIU S L, WUU D S, WU Y Y. Characteristics of heater films for inkjet printhead [C]//Proceedings of SPIE: Part of the SPIE Conference on Input/Output and Imaging Technologies. Taipei, Taiwan, 1998: 61–68.

3. The third-generation hp thermal inkjet printhead [J];ADEN;Hewlett-Packard Journal,1994

4. LIM J H, KUK K, SHIN S J, BAEK S S, KIM Y J, SHIN J W, OH Y S. Investigation of reliability problems in thermal inkjet printhead [C]//Proceedings of 42nd Annual 2004 IEEE International: Reliability Physics Symposium. Phoenix, USA, 2004.

5. Structural and electrical properties of Ta-Al thin films by magnetron sputtering [J];WUU;Applied Surface Science,1998

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