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Width determination of SiO2-films in Si-based devices using low-loss EFTEM: image contrast as a function of sample thickness

  • Published:2003-01 Issue:1 Volume:34 Page:1-7
  • ISSN:0968-4328
  • Container-title:Micron
  • language:en
  • Short-container-title:Micron

Author:

Schaffer Bernhard,Grogger Werner,Hofer Ferdinand

Publisher

Elsevier BV

Subject

Cell Biology,Structural Biology,General Physics and Astronomy,General Materials Science

Reference14 articles.

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2. Quantitative elemental mapping of materials by energy-filtered imaging;Crozier;Ultramicroscopy,1995

3. Transmission electron microscopy study of N+-implanted silicon on insulator by energy-filtering imaging;Duan;Journal of Applied Physics,1991

4. Electron Energy Loss Spectroscopy in the Electron Microscope;Egerton,1996

5. Spatial resolution of nanostructural analysis by electron energy-loss spectroscopy and energy-filtered imaging;Egerton;Journal of Electron Microscopy,1999

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