Drift-tube studies of SF3+ and SF5+ ions in SF6 gas

Author:

Talib Z.A.,Saporoschenko M.

Publisher

Elsevier BV

Subject

Spectroscopy

Cited by 23 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. One-dimensional Ar-SF6 hydromodel at low-pressure in e-beam generated plasmas;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2016-03

2. SF6and C4F8global kinetic models coupled to sheath models;Plasma Sources Science and Technology;2014-10-20

3. Modeling of inductively coupled plasma SF6/O2/Ar plasma discharge: Effect of O2 on the plasma kinetic properties;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2014-03

4. Analysis of Excitation and Ionization of Atoms and Molecules by Electron Impact;Springer Series on Atomic, Optical, and Plasma Physics;2011

5. A global model for SF6plasmas coupling reaction kinetics in the gas phase and on the surface of the reactor walls;Journal of Physics D: Applied Physics;2009-02-18

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