Determination of absolute partial and total electron impact ionization cross-sections for CF2Cl2 from threshold up to 180 eV: an improved experimental method-Reference-Cited by-同舟云学术

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Determination of absolute partial and total electron impact ionization cross-sections for CF2Cl2 from threshold up to 180 eV: an improved experimental method

Published:1989-01 Issue:2 Volume:87 Page:209-224
ISSN:0168-1176
Container-title:International Journal of Mass Spectrometry and Ion Processes
language:en
Short-container-title:International Journal of Mass Spectrometry and Ion Processes

Author:

Leiter K.,Scheier P.,Walder G.,Märk T.D.

Publisher

Elsevier BV

Subject

Spectroscopy

Reference21 articles.

1. The design of plasma etchants

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4. Electron impact ionisation cross sections derived from total inelastic cross section for CF3X and CF2X2 (X = H, Cl, Br and I) molecules;Molecular Physics;2016-02-24

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