A New Method for Three Dimensional Excimer Laser Micromachining, Hole Area Modulation (HAM)-Reference-Cited by-同舟云学术

A New Method for Three Dimensional Excimer Laser Micromachining, Hole Area Modulation (HAM)

Author:

Masuzawa T.,Olde-Benneker J.,Eindhoven J.J.C.

Publisher

Elsevier BV

Subject

Industrial and Manufacturing Engineering,Mechanical Engineering

Reference11 articles.

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