Author:
Nakao M.,Tsuchiya K.,Matsumoto K.,Hatamura Y.
Subject
Industrial and Manufacturing Engineering,Mechanical Engineering
Reference8 articles.
1. Assembly of Microsystems;von Brussel;Annals of the CIRP,2000
2. Integrated Movable Micro-Mechanical Structures for Sensors and Actuators;Fan;IEEE Trans. Electron Devices,1988
3. Micromachined Corner Cube Reflectors as a Communication Link;Gunawan,1995
4. Construction of an Integrated Manufacturing System for 3D Microstructure Concept, Design and Realization;Hatamura;Annals of the CIRP,1997
5. Image-Driven Operation System for the Nano Manufacturing World;Matsumoto;SPIE '96,1996
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