Computer Simulation of Profile Changes of Hemi-Spherical Diamond Styli During Ion Beam Machining
Author:
Publisher
Elsevier BV
Subject
Industrial and Manufacturing Engineering,Mechanical Engineering
Reference5 articles.
1. Stylus Profiling Instrument for Measuring Statistical Properties of Smooth Surfaces;Bennet;Appl. Opt.,1981
2. Fabrication of Large Scale Optical Components in Silicon by Reactive Ion Etching;Darbyshire;J. Vac. Sci. Technol.,1987
3. Profile Forming of a Sub-micron Radius Circular Cone-Shaped Diamond Tool Tip by Ion Sputter-Machining;Miyamoto;Prec. Engg.,1983
4. The Influence of Non-Uniform Incident Flux upon Surface Erosion Process;Carter;J. Mater. Sci.,1979
5. Development of a General Surface Contour by Ion Erosion;Ducommun;J. Mater. Sci.,1974
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