Positioning Table with High Accuracy and High Speed-Reference-Cited by-同舟云学术

Positioning Table with High Accuracy and High Speed

Published:1990 Issue:1 Volume:39 Page:433-436
ISSN:0007-8506
Container-title:CIRP Annals
language:en
Short-container-title:CIRP Annals

Author:

Yonezawa H.,Hirata Y.,Sasai H.,Uehara K.

Publisher

Elsevier BV

Subject

Industrial and Manufacturing Engineering,Mechanical Engineering

Reference7 articles.

1. Study on Precision Positioning by Friction Drive (2nd report) -Trapezoidal Velocity Control-;Otsuka;J.JSPE,1989

2. High Precision Positioning for Submicron Lithography -Mask Alignment and XY Stage for X-ray and E-beam Systems-;Ishihara;Bull. Japan Soc. of Prec. Engg.,1987

3. Vertical Micro Positioning System Using PZT Actuator;Goto;Bull. Japan Soc. of Prec. Engg.,1987

4. Precision X-Y Stage with Piezo-driven Fine-table;Moriyama;Bull. Japan SOC. of Prec. Engg.,1988

5. High Precision Positioning Technology (1st report) -Simulation Analysis on Fast Positioning-;Sasai;J. JSPE,1988

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