Laser Beam as a Straight Datum and Its Application to Straightness Measurement at Nanometer Level
Author:
Publisher
Elsevier BV
Subject
Industrial and Manufacturing Engineering,Mechanical Engineering
Reference2 articles.
1. Calibration and Use of Optical Straightedges in the Metrology of Precision Machines;Estler;Optical Engineering,1985
2. High Precision Optical Surface Sensor (HIPOSS-1);Ozawa;Journal of the Japan Society of Precision Engineering,1986
Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Development of a 6-DoF motion system for realizing a linear datum for geometric measurements;Review of Scientific Instruments;2016-08
2. Straightness measurements with a reflection confocal optical system—an experimental study;Applied Optics;2002-07-01
3. Straightness measurements by use of a reflection confocal optical system;Applied Optics;1999-09-01
4. Development of a new measurement system for straightness error by a heterodyne interferometer with a grating;Initiatives of Precision Engineering at the Beginning of a Millennium
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