Investigation of Femtosecond Laser-assisted Micromachining of Lithium Niobate
Author:
Publisher
Elsevier BV
Subject
Industrial and Manufacturing Engineering,Mechanical Engineering
Reference16 articles.
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4. Femtosecond ultraviolet (248 nm) excimer laser processing of Teflon (PTFE);Adhi;Applied Surface Science,2003
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1. A new chemo-mechanical slurry for close-to-atomic scale polishing of LiNbO3 crystal;CIRP Annals;2023
2. Adaptive shearing-gradient thickening polishing (AS-GTP) and subsurface damage inhibition;International Journal of Machine Tools and Manufacture;2021-01
3. Good-Quality and High-Efficiency Dicing for Thick LiNbO3 Wafers Using Picosecond Laser Pulses;Micromachines;2019-12-31
4. A study on the micromachining of molybdenum using nanosecond and femtosecond lasers;The International Journal of Advanced Manufacturing Technology;2017-12-23
5. Lithium Niobate Micromachining for the Fabrication of Microfluidic Droplet Generators;Micromachines;2017-06-09
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