Measurement Technology for the Machine-Integrated Determination of Form Deviations in Optical Surfaces-Reference-Cited by-同舟云学术

Measurement Technology for the Machine-Integrated Determination of Form Deviations in Optical Surfaces

Published:2006 Issue:1 Volume:55 Page:559-562
ISSN:0007-8506
Container-title:CIRP Annals
language:en
Short-container-title:CIRP Annals

Author:

Schmitt R.,Doerner D.,Pfeifer T.

Publisher

Elsevier BV

Subject

Industrial and Manufacturing Engineering,Mechanical Engineering

Reference12 articles.

1. Approach to a Machine-Integrated Measurement and Simulation Tool for the Manufacturing of ultra precise Surfaces, Production Engineering;Weck;XII/,2005

2. Development of productivity in aspherical precision machining with in-situ metrology;Nishiguchi;Annals of the CIRP,1991

3. Optical Shop Testing;Malacara,1992

4. Vibration in phase-shifting interferometry;de Groot;J. Opt. Soc. Am. A,1995

5. Simultaneous phase-shift interferometer;Koliopoulos;Proceeding of SPIE,1992

Cited by 12 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Design and Assessment of Phase-Shifting Algorithms in Optical Interferometer;International Journal of Precision Engineering and Manufacturing-Green Technology;2022-12-13

2. Fringe analysis for thickness estimation of optical glass plate using Fizeau interferometer;Optics Communications;2022-06

3. Wavelength-tuning multiple-surface interferometric analysis with compression of Zernike piston phase error;Measurement;2021-11

4. Interferometric thickness measurement of glass plate by phase-shifting analysis using wavelength scanning with elimination of bias phase error;Optical Review;2021-01-24

5. Algorithm for Surfaces Profiles and Thickness Variation Measurement of a Transparent Plate Using a Fizeau Interferometer with Wavelength Tuning;Applied Sciences;2019-06-07