Mass Spectrometers, Helium Leak Detectors, and Residual Gas Analyzers

Author:

Bishop Charles A.

Publisher

Elsevier

Reference10 articles.

1. Vasile MJ, Dylla HF. Mass spectrometry of plasmas. In: Plasma diagnostics—vol. 1—discharge parameters and chemistry. Academic Press; 1989 [chapter 4]. ISBN 0 12 067635 4.

2. Harris N. Modern vacuum practice. McGraw-Hill; 1989. ISBN 0 07 707099 2.

3. Robinson T. Applications of quadrupole residual gas analysers for the monitoring of and troubleshooting in vacuum process equipment. In: Proc. 29th annual technical conference of the Society of Vacuum Coaters; 1986. p. 424–42.

4. The interpretation of mass spectra in vacuum measurement;Craig;Vacuum,1966

5. Basford JA, et al. ‘Recommended practice for the calibration of mass spectrometers’. J Vac Sc Technol 1993;11(3):A22 (19 pages).

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