Enhanced formation of thermal donors in oxygen-implanted silicon annealed at different pressures-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Enhanced formation of thermal donors in oxygen-implanted silicon annealed at different pressures

Published:2000-12 Issue:1-2 Volume:293 Page:44-48
ISSN:0921-4526
Container-title:Physica B: Condensed Matter
language:en
Short-container-title:Physica B: Condensed Matter

Author:

Neustroev E.P.,Antonova I.V.,Popov V.P.,Kilanov D.V.,Misiuk A.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference22 articles.

1. Oxygen precipitation in silicon

2. Proximity gettering of transition metals in separation by implanted oxygen structures

3. A. Auberton-Herve, A. Wittkower, B. Aspar, Proceedings of the 10th International Conference on Ion Implantation Technology, Italy, 1994, p. 420.

4. Mechanism of the Formation of Donor States in Heat-Treated Silicon

Cited by 8 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Specific features of the electrophysical parameters of NTD Si treated under different conditions of heat treatment;Semiconductors;2016-06

2. Electrical Characterization of Deep-Lying Donor Layers Created by Proton Implantation and Subsequent Annealing in N-Type Float Zone and Czochralski Silicon;ECS Transactions;2009-09-25

3. Radiation Defects and Thermal Donors Introduced in Silicon by Hydrogen and Helium Implantation and Subsequent Annealing;Solid State Phenomena;2007-10

4. Local lifetime control in silicon power diode by ion irradiation: introduction and stability of shallow donors;IET Circuits, Devices & Systems;2007

5. Thermal donor formation in silicon enhanced by high-energy helium irradiation;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2006-12

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3