Effects of interface micro structure in crystallization of ZnO thin films prepared by radio frequency sputtering-Reference-Cited by-同舟云学术

Effects of interface micro structure in crystallization of ZnO thin films prepared by radio frequency sputtering

Published:1998-12 Issue:4 Volume:51 Page:601-607
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Yoshino Y,Inoue K,Takeuchi M,Ohwada K

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference17 articles.

1. Characterization of ZnO piezoelectric films prepared by rf planar‐magnetron sputtering

2. Yoshino, Y., Kadota, M., Ieki, H., Kasanami, T. and Wakino, K., in Proceedings 8th International Symposium on Plasma Chemistry, Vol. 2. Tokyo, Japan, 1987, p. 2271.

3. Larson, J.D., Winslow, D.K. and Zitelli, L.T., IEEE Trans, Sonics and Ultrason., 1972, SU19, 18.

Cited by 72 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Nanosecond-laser annealing of zinc oxide thin-films: The effect of the laser wavelength and fluence;Thin Solid Films;2024-02

2. As-Grown Crystalline InGaZnO by Spray Pyrolysis on a Flexible Substrate for a Thin-Film Transistor with Excellent Stability;ACS Applied Materials & Interfaces;2023-08-10

3. Nanosecond-Laser Annealing of Zinc Oxide Thin-Films: The Effect of the Laser Wavelength and Fluence;2023

4. c-Axis-tilted ScAlN films grown on silicon substrates for surface acoustic wave devices;Japanese Journal of Applied Physics;2022-05-30

5. Metal-insulator multilayer precursors for enhanced Sm2+ absorption and Tm2+ luminescence in SiAlO thin films prepared by magnetron sputtering;Journal of Luminescence;2022-01