Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Cited by
3 articles.
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1. Thermokinetic actuation for batch assembly of microscale hinged structures;Journal of Microelectromechanical Systems;2003-08
2. References;Vacuum Technology;1990
3. Thermo-kinetic actuation for hinged structure batch microassembly;Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266)