Pumping characteristics of a vacuum system using a rotary pump and sublimation pump
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference11 articles.
1. Cryogenically Pumped Coating Plant for Thin-Film Production under Clean Vacuum Condition
2. New Developments in Getter—Ion Pumps in the U.S.S.R.
3. Mass Spectrometric Studies on the Limitations of Oil Diffusion Pumped Coaters
4. The Use of Diffusion Pumps for Obtaining Ultraclean Vacuum Environments
5. Exceptionally Rapid Cycling Vacuum System
Cited by 3 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. AC operation of large titanium sublimation pumps in a magnetic field: Results of the test stand for the W7-X neutral beam injectors;Fusion Engineering and Design;2014-12
2. References;Vacuum Technology;1990
3. Performance of the titanium sublimation trap in relatively poor vacuum systems;Vacuum;1987-01
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