Nitride formation using a magnetized sheet plasma source
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference17 articles.
1. Corrosion of thin hard PVD coatings
2. Structure and properties of TiN coatings
3. X-ray diffraction peak profile analysis of TiNx films prepared on silicon by reactive ion beam assisted deposition
4. Titanium nitride sputter deposition on to dies using twin ion beams for dynamic material mixing
5. Ultralow load indentation hardness and modulus of K – and α–Al2O3 CVD coatings
Cited by 3 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Enhancement mechanism of H- production and suitable configurations for materials processing in a magnetized sheet plasma;International Journal of Modern Physics: Conference Series;2014-01
2. 3D Isosurface Visualization of Electron Density and Temperature Distribution in a Magnetized Sheet Plasma Ion Source;Plasma and Fusion Research;2010
3. A magnetized sheet plasma source for the synthesis of TiN on stainless steel substrates;Thin Solid Films;2006-05
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