Holey-plate plasma source for plasma processing
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference8 articles.
1. Affecting factors on surface‐wave‐produced plasma
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3. Optical Emission and Microwave Field Intensity Measurements in Surface Wave-Excited Planar Plasma
4. Microwave discharges;Marec,1998
5. Disk plasma generation using a holey-plate surface-wave structure on a coaxial waveguide
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