Silicon oxide films from the Plasmodul®
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference25 articles.
1. Low-temperature deposition of high-quality silicon dioxide films by sputtering-type electron cyclotron resonance plasma
2. Chin BL, van de Ven EP. Solid State Technol 1988;119.
3. Gaillard F, Brault P, Brouquet P. J Vac Sci Technol A 1997;2478.
4. Plasma-enhanced chemically vapour-deposited silicon dioxide for metal/oxide/semiconductor structures on InSb
5. Chemical Vapour Deposition in Microwave Produced Plasmas for Fiber Preforms
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