Ion temperature and fluctuation in a large-diameter electron–cyclotron-resonance plasma
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference14 articles.
1. Microwave ion source
2. Microwave Plasma Etching
3. Low Temperature Chemical Vapor Deposition Method Utilizing an Electron Cyclotron Resonance Plasma
4. Cold and Low-Energy Ion Etching (COLLIE)
5. Ion and neutral temperatures in an electron cyclotron resonance plasma
Cited by 6 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Experimental and numerical investigation of ion temperature in an ECR plasma;Vacuum;2006-05
2. Ion temperature in a large diameter ECR plasma;Thin Solid Films;2006-05
3. Gas mixture ratio dependence of ion temperature in ECR plasma;Surface and Coatings Technology;2005-04
4. Effect of Boundary Condition on Chaotic Behavior of Fluctuation Excited in Electron Cyclotron Resonance Plasma;Journal of the Physical Society of Japan;2005-03
5. Measurement of ion temperature in N2/Ar and O2/Ar ECR plasma;Vacuum;2004-06
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