Effects of oxygen gettering and target mode change in the formation process of reactively RF sputtered WOx thin films
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference9 articles.
1. Handbook of inorganic electrochromic materials;Granqvist,1995
2. Physical and electrochromic properties of the amorphous and crystalline tungsten oxide thick films prepared under reducing atmosphere
3. The Electrochromic Process at WO 3 Electrodes Prepared by Vacuum Evaporation and Anodic Oxidation of W
4. Electrochromic performance of sol-gel deposited WO3–V2O5 films
5. Physical and electrochemichromic properties of rf sputtered tungsten oxide films
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