About an influence of Ar ion beam of very low energy on a-Si:H properties
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference11 articles.
1. Infrared and Raman spectra of the silicon-hydrogen bonds in amorphous silicon prepared by glow discharge and sputtering
2. Structural interpretation of the vibrational spectra ofa-Si: H alloys
3. Van Cleef MWM, Schuurmans FM, Van der Heide ASH, Schönecker A, Schropp REI. Proceedings of the Second World Conference Photovoltaic Solar Energy Conversion, Viena, Austria, 1998, p. 1661.
4. Proton-magnetic-resonance studies of microstructure in plasma-deposited amorphous-silicon—hydrogen films
5. Mechanical stress reduction in PECVD a-Si:H thin films
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1. Role of Ar dilution of SiH4/PH3 gas mixture on PECVD based film growth process, hydrogen bonding configuration, and optical properties of n-type a-Si:H thin films;Chemical Physics;2023-11
2. Argon Plasma Treatment at the i-/p-Interface in Silicon Thin-Film Solar Cells and its Influence on the Light Induced Degradation;Energy Procedia;2015-12
3. On a presence of SimHn clusters in a-Si:H/c-Si structures;Applied Surface Science;2006-08
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