Subject
Industrial and Manufacturing Engineering,Computer Science Applications,Modeling and Simulation,Control and Systems Engineering
Reference21 articles.
1. Model-based control in rapid thermal processing;Balakrishnan;Thin Solid Films,2000
2. Neuro-Dynamic Programming;Bertsekas;Neurodynamic programming,1996
3. Semi-Empirical Model-Based Multivariable Iterative Learning Control of an RTP System;Cho;IEEE Trans. Semicond. Manuf.,2005
4. A Learning Approach of Wafer Temperature Control in a Rapid Thermal Processing System;Choi;IEEE Transactions on Semiconductor Manufacturing,2001
5. Modeling and temperature control of rapid thermal processing;Dassau;Comput. Chem. Eng.,2006
Cited by
6 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献