The optimal drift-compensatory and fault tolerant approach for mixed-product run-to-run control-Reference-Cited by-同舟云学术

The optimal drift-compensatory and fault tolerant approach for mixed-product run-to-run control

Published:2009-09 Issue:8 Volume:19 Page:1401-1412
ISSN:0959-1524
Container-title:Journal of Process Control
language:en
Short-container-title:Journal of Process Control

Author:

Ai Bing,Zheng Ying,Jang Shi-Shang,Wang Yanwei,Ye Lin,Zhou Chunjie

Publisher

Elsevier BV

Subject

Industrial and Manufacturing Engineering,Computer Science Applications,Modelling and Simulation,Control and Systems Engineering

Reference21 articles.

1. Run-to-Run Control in Semiconductor Manufacturing;Moyne,2001

2. Further contributions to adaptive quality control: simultaneous estimation of dynamics: nonzero costs;Box;Bull. Int. Stat. Inst.,1963

3. Run by run process control: combining SPC and feedback control;Sachs;IEEE Trans. Semicond. Manuf.,1995

4. Stability and sensitivity of an EWMA controller;Ingolfsson;J. Quality Technol.,1993

5. T. Smith, Novel techniques for the run by run process control of chemical–mechanical polishing, M.S. Thesis, Electrical Engineering and Computer Science Dept., MIT, Cambridge, MA, 1996.

Cited by 17 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. A New Double Exponentially Weighted Moving Average Run-to-Run Control Using a Disturbance-Accumulating Strategy for Mixed-Product Mode;IEEE Transactions on Automation Science and Engineering;2021-10

2. Minimax Optimization for Recipe Management in High-Mixed Semiconductor Lithography Process;IEEE Transactions on Industrial Informatics;2020-08

3. Model Calibration Method for Soft Sensors Using Adaptive Gaussian Process Regression;IEEE Access;2019

4. State of the Art Review on Process, System, and Operations Control in Modern Manufacturing;Journal of Manufacturing Science and Engineering;2018-03-30

5. Canonical variable analysis and long short-term memory for fault diagnosis and performance estimation of a centrifugal compressor;Control Engineering Practice;2018-03