1. Development of inferential measurements using neural networks;Bhartiya,2001
2. Application development of virtual metrology in semiconductor;Chang,2005
3. A novel virtual metrology scheme for predicting CVD thickness in semiconductor manufacturing;Hung,2007
4. A virtual metrology system for semiconductor manufacturing;Kang;Expert Systems with Applications,2009
5. A systematic approach for soft sensor development;Lin;Computers & Chemical Engineering,2007