AN ABSOLUTE CAPACITIVE POSITION TRANSDUCER FOR LITHOGRAPHY.-Reference-Cited by-同舟云学术

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AN ABSOLUTE CAPACITIVE POSITION TRANSDUCER FOR LITHOGRAPHY.

Published:1993 Issue: Volume: Page:992-1002
ISSN:
Container-title:International Progress in Precision Engineering
language:
Short-container-title:

Author:

Zhu F.,Spronck J.W.,van Beek H.F.

Publisher

Elsevier

Reference14 articles.

1. Application of capacitance techniques in sensor design;Heerens;J. Phys. E: Sci. Instrum.,1986

2. Electronic transducers for industrial measurement of low value capacitances;Huang;J. Phys. E: Sci. Instrum.,1988

3. Inexpensive linear displacement transducer using a low power lock-in amplifier;Jay Dratler;Rev. Sci. Instrum.,1977

4. The design and some applications of sensitive capacitance micrometers;Jones;Journal of Physics E: Sci. Instrum.,1973

5. Capacitive transducer for accurate displacement control;Kosel;IEEE Trans. on Instrum. and Meas.,1981

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